Self-adapting micro-valves and micro-fins for micro-fluidic cooling of chips

Market Maturity

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Innovation topic

Deep Tech

Date of analysis

Innovation Radar's analysis of this innovation is based on data collected on 27/10/2016

Go to market needs

Needs that, if addressed, can increase the chances this innovation gets to (or closer to) the market incude:

  • Prepare for Market entry
  • Scale-up market opportunities
  • Project

    This innovation was developed under the Horizon 2020 project STREAMS. Details of this project are provided below:

    Project acronym: STREAMS

    Project Title: Smart Technologies for eneRgy Efficient Active cooling in advanced Microelectronic Systems

    Project description: The aim of STREAMS is to bring Europe into the new leading thermal management paradigm and maintain EU position at the forefront of ICT development. With a focused consortium gathering complementary experts, STREAMS will develop a generic active cooling thermal management solution (reaching TRL4), to keep nanoelectronic devices and systems performances at their best, while meeting IC future challenges.To successfully integrate Versatile microfluidic actuation, Anticipating thermal map and Thermal energy harvesting in a Si-based interposer, STREAMS will:- Lay-out advanced functionalities for the power efficient cooling control of application use-cases with critical heat load spatial distributions including hotspot areas (150 to 300 W/cm2) and background areas (20W/cm2) and temporal heat load variation in typical sub-second time scale - Develop self-adaptive and controlled micro-fluidic actuators to decrease by 25% both the pressure loss and the fluid flow rate, while controlling the temperature distribution within 15% below the acceptable limits of each component for spatial and temporal heat flux variation scenarios- Integrate IC compatible passive heat flux sensors (sensitivity up to S=100mV/K) at the interposer level to anticipate thermal map variation (time response~200ms, lateral spatial resolution=500µm)- Take advantage of existing thermal gradients to embed high performance nanostructured thermoelectric generator (harvested power up to 10mW) to power local functionalities (microfluidic valves, power management and read-out circuits, control ASIC)- Integrate the developed functionalities into a Si based interposer to demonstrate a smart, adaptable and embedded active cooling thermal management solution with reduced footprint (70% thickness reduction) and reduced consumption (-50%)- Assess reliability and performances of STREAMS thermal management solution in real future high performance applications in micro-servers (P=50W) and network use cases (P=200W)

    Project end date: 30/06/2019

    More info:

    • Read more about this project on CORDIS (find names of contact persons and their phone numbers on the CORDIS page)

    • Details of this project on the Horizon 2020 dashboard

    Key Innovator(s)



    Large Enterprise



    Higher Education Instutite / Research Centre



    Higher Education Instutite / Research Centre